着任前の研究成果 臼杵 深
1) S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu, Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (2nd report) -Experimental Verification of Resolution Property by Standing Wave Illumination Shift-, Journal of the Japan Society for Precision Engineering, Vol.74, No.6, pp.581-586, 2008
2) S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu, Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light, Measurement Science and Technology, vol.19, 084006 (10pp), 2008
3) S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu, Super-Resolution Optical Measurement for Ultra-Precision Machined Surface Defects by Using Structured Light Illumination Shift (1st report) -Theoretical Verification of Resolution Property-, Journal of the Japan Society for Precision Engineering, Vol.74, No.5, pp.498-503, 2008
4) S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu, Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift, Proceedings of 8th Int. Symposium on .Measurement Technology and Intelligent Instruments, (2007), pp387-390.
5) S. Usuki, H. Bing，K. Kiyosawa，K. Enami，M. Hiraki，S. Takahashi，K. Takamasu，S. Ozono, Three Dimensional Displacement Measurement Using Ring Beam (2nd report) -Improvement of Nonlinearity by Ellipse Approximation of Ring Image-, Journal of the Japan Society for Precision Engineering, Vol.72, No.1, pp.132-136, 2006
6) S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu, Development of Super-resolution optical inspection system for semiconductor defects using standing wave shift, Proceedings of SPIE International Symposium on Optics East 2006, (2006), pp637508-1～637508-9.
7) S. Usuki, K. Enami, M. Hiraki, S. Takahashi, K. Takamasu, Theoretical Analysis and Basic Experiments for the 3D Displacement Measurement Using Ring-Shaped Laser Beam, Key Engineering Materials, vol.295, pp295-300, 2005
8) S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu, Super-resolution optical inspection for semiconductor defects using standing wave shift, Proceedings of SPIE International Symposium on Optomechatronic Technologies 2005, (2005), pp60490C-1～60490C-11.
9) S. Usuki, T. Nakano, S. Takahashi, K. Takamasu, Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials Using Near-Field Optics, Proceedings of.5th International conference of the european society for precision engineering and nanotechnology, (2005), pp85-88.
10) S. Usuki, K. Enami, O. Sato, S. Takahashi, K. Takamasu, Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, Proceedings of 4th International Conference of the European Society for Precision Engineering and Nanotechnology, (2004), pp328-329.
