Mr.Hosaka received Best Presentation Award in AWPT
Mr Atsuki Hosaka (Master's student in Sanada/Mizushima lab, Mechanical Engineering Course) received Best Presentation Award in Asian Workshop on Planarization /CMP Technology (AWPT).
Asian Workshop on Planarization /CMP Technology (AWPT) was held online on October 29, 2021.
Measurement of near-surface brush volume ratio and nodule volume change for moving PVA brushes
Atsuki Hosaka, Yuki Mizushima, Satomi Hamada, Ryota Koshino, Akira Fukunaga, Toshiyuki Sanada