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Awards/PrizesMr.Hosaka received Best Presentation Award in AWPT

11/04/21

Mr Atsuki Hosaka (Master's student in Sanada/Mizushima lab, Mechanical Engineering Course) received Best Presentation Award in Asian Workshop on Planarization /CMP Technology (AWPT).

Asian Workshop on Planarization /CMP Technology (AWPT) was held online on October 29, 2021.


■Title:
Measurement of near-surface brush volume ratio and nodule volume change for moving PVA brushes

■Author:
Atsuki Hosaka, Yuki Mizushima, Satomi Hamada, Ryota Koshino, Akira Fukunaga, Toshiyuki Sanada


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